High-Purity SiC Vertical Furnace Tube High-Temperature Resistant
A Silicon Carbide (SiC) Vertical Furnace Tube is a high-performance ceramic structural component manufactured using processes such as reaction sintering or chemical vapor deposition (CVD). It is specifically designed for extreme environments in semiconductor manufacturing, metallurgy, and high-temperature industries. By leveraging the core material properties of silicon carbide—high hardness, high stiffness, low thermal expansion, high thermal conductivity, and excellent chemical stability—it maintains exceptional dimensional stability (with a coefficient of thermal expansion as low as 4.0-5.0×10⁻⁶/K) and structural integrity under conditions exceeding 1700°C, in corrosive atmospheres, and during rapid temperature changes. It provides a reliable material solution for high-temperature processes.
SiC Vertical Furnace Tube Characteristics and Advantages
| Feature Category | Core Advantage | Key Parameters/Performance |
| High-Temperature Stability | Extremely low thermal expansion, high temperature resistance | Coefficient of thermal expansion 4.0~5.0×10⁻⁶/K (-196°C to 1600°C), maximum service temperature >1700°C |
| Thermal Management | Excellent thermal conductivity, rapid temperature equalization | Thermal conductivity ≥120 W/(m·K) (room temperature), ~45 W/(m·K) (1200°C) |
| Mechanical Strength | High hardness, high stiffness, resistance to deformation | Mohs hardness 9.5, elastic modulus 410 GPa or higher |
| Chemical Inertness | Resistance to acids, alkalis, and plasma erosion | Corrosion rate in strong acid (70% HNO₃) and strong alkali (45% KOH) <0.2 mg/(cm²·h) |
| Service Life & Reliability | Thermal shock resistance, long life, low maintenance | Withstands thermal shock testing from 1200°C to room temperature (quenching) while maintaining structural integrity, and exhibits dimensional deviation <0.1mm after continuous operation for 2 years in industrial scenarios |
SiC Vertical Furnace Tube Main Application Areas
- Semiconductor Manufacturing: Used as core components such as wafer boats, liner tubes, and thermal baffles in vertical diffusion furnaces and CVD reactors, supporting processes like high-temperature oxidation/diffusion and epitaxial growth, ensuring wafer processing precision and yield.
- Metallurgy and High-Temperature Processing: Serves as furnace linings, crucibles, and load-bearing guides in non-ferrous metal smelting (aluminum, copper, zinc) and steel manufacturing, withstanding corrosion from molten metal and high-temperature loads.
- Industrial Kilns and Energy: Applied in tunnel kilns and shuttle kilns as high-temperature kiln furniture and burner components, and as corrosion-resistant structural parts in new energy equipment (e.g., fuel cells).
Related Product Recommendations
SiC Vertical Furnace Tube Q&A
Q1: What is the primary application of a silicon carbide (SiC) vertical furnace tube?
A1: It is primarily used as a high-temperature reactor tube in semiconductor diffusion furnaces, CVD systems, and industrial kilns (e.g., for SiC/GaN epitaxial growth, oxidation, or annealing processes at 1500–1700°C), providing exceptional thermal stability and corrosion resistance in extreme environments.
Q2: Why choose silicon carbide over traditional materials for vertical furnace tubes?
A2: Silicon carbide offers superior high-temperature strength (up to 1700°C), extreme thermal shock resistance (low CTE ~4.5×10⁻⁶/K), and excellent chemical inertness (resisting acids, alkalis, and plasma erosion), ensuring long service life, minimal maintenance, and stable performance in corrosive atmospheres like HCl or metal vapors.
Tags: #SiC Vertical Furnace Tube, #High-Purity, #Customized, #SiC Ceramics, #High-Temperature Resistant
