Alumina Ceramic Custom Components High Hardness for Semiconductor Manufacturing Equipment
Alumina ceramic custom components are advanced ceramic parts manufactured through a series of processes including powder preparation, forming, high-temperature sintering, and precision machining, using high-purity aluminum oxide (Al₂O₃) as the primary raw material. The alumina content typically ranges from 75% to 99.9%, with higher content yielding superior performance. These products are not standard off-the-shelf items but rather functional, engineered core components designed and produced according to customers' specific application scenarios and technical requirements.
ZMSH Services:
We are a supplier focused on high-performance ceramic and semiconductor material solutions. We not only provide the design and manufacturing of high-purity, high-density alumina ceramic custom components but also possess a robust multi-material technology platform. In addition to alumina products, we specialize in producing sapphire wafers and optical windows, silicon carbide (SiC) wafers, SiC ceramic trays and fixtures, as well as silicon wafers, SOI (Silicon on Insulator), and other semiconductor material products. We are committed to offering customers one-stop custom services from material selection and structural design to precision machining, meeting diverse needs in optoelectronics, semiconductors, vacuum, high-temperature, and other extreme environments.
Alumina ceramic custom components Key Parameter
| Alumina (Al₂O₃) Purity | Usually ≥ 99.6% |
| Bulk Density | ≥ 3.90 g/cm³ |
| Water Absorption | 0% |
| Flexural Strength | ≥ 350 MPa |
| Compressive Strength | ≥ 2500 MPa |
| Vickers Hardness (Hv50) | ≥ 1600 kgf/mm² |
| Maximum Use Temperature | ≥ 1600 °C |
| Thermal Conductivity | ~25-30 W/(m·K) |
| Coefficient of Thermal Expansion (CTE) | ~7-8 x 10⁻⁶ /K |
| Volume Resistivity | > 10¹⁴ Ω·cm @ 25°C |
| Dielectric Strength | ≥ 15 kV/mm |
| Surface Roughness (Ra) | Customizable, typically < 0.2 μm (even < 0.05 μm) |
| Flatness / Parallelism | According to the requirements of the drawing, it is usually at the micrometer (μm) level. |
Alumina ceramic custom components Key Characteristics
The exceptional properties of alumina ceramic make it stand out among numerous engineering materials:
① Extreme Hardness and Wear Resistance:
- With a Mohs hardness of up to 9, second only to diamond and silicon carbide, it is highly resistant to scratching and wear. Even under harsh conditions with particulates or frequent friction, it maintains dimensional stability and surface smoothness over long periods, significantly extending equipment service life.
② Excellent Electrical Insulation:
- It maintains high resistivity even in high-temperature and high-humidity environments, making it an ideal high-temperature insulating material. Widely used in circuit substrates, insulating rings, coil bobbins, etc., it ensures the safe and stable operation of electronic equipment under high voltage.
③ Good Chemical Stability:
- It exhibits strong resistance to most acids, alkalis, and solvents, is insoluble in water, oxidation-resistant, and不易腐蚀 (not easily corroded). This makes it highly suitable for chemical, biomedical, and semiconductor equipment, serving as chambers, pipes, or components that come into contact with corrosive media.
④ High Heat Resistance and Low Thermal Expansion Coefficient:
- With a melting point as high as 2050°C, it can operate long-term in high-temperature environments up to 1600°C. Its low thermal expansion coefficient means minimal deformation under rapid temperature changes, good thermal shock resistance, and no cracking due to thermal cycling.
⑤ High Mechanical Strength:
- Although less tough than metals, it has very high compressive strength and can withstand significant loads.
Alumina ceramic custom components Application Fields
Leveraging these comprehensive properties, alumina ceramic custom components are widely used in various critical aspects of high-tech industries:
1. Semiconductor Manufacturing Equipment:
- Wafer Processing: Used as insulating parts in etching machines, diffusion furnaces, and CVD equipment; wafer polishing pads; chamber liners; gas distribution plates, etc. Its high purity, plasma erosion resistance, and high-temperature resistance are crucial.
- Packaging and Testing: Serves as probe card substrates, insulating parts of test fixtures, etc.
2. Electronics and Power Industry:
- Circuit Substrates and Packaging: Used in thick/thin film circuit substrates, electronic packaging housings (e.g., laser diode packages), insulating shells for high-voltage switches, providing mechanical support and electrical isolation.
- Energy-Saving Lamps and Vacuum Devices: Used as sodium lamp tubes, arc tubes, insulating rings for vacuum connectors, etc.
3. Industrial Automation and Wear-Resistant Components:
- Used as thread guides and nozzles in textile machinery; focusing lens mounts in laser welding equipment; guides and bearings in precision instruments, leveraging its high wear resistance to ensure long-term accuracy.
4. Medical and Biotechnology:
- Used in insulating components of medical devices, artificial joints, dental materials, etc., utilizing its biocompatibility, resistance to sterilization corrosion, and high hardness.
5. Energy and Chemical Industry:
- Used as separator plates in fuel cells, mechanical seal rings in chemical pumps, valve components, etc., to handle corrosive and high-temperature environments.
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1. Q: What are alumina ceramic components used for in semiconductor manufacturing?
A: They are used for critical parts like wafer polishing pads, plasma-resistant chambers, and insulating components due to their high purity, wear resistance, and ability to withstand harsh processing environments.
2. Q: Why is alumina preferred for high-temperature and corrosive applications?
A: Alumina ceramic offers exceptional thermal stability, high hardness, and excellent chemical inertness, making it ideal for use in extreme conditions where metals and polymers would fail.
Tags: #Alumina Ceramic Custom Components, #Custom, #High Hardness, #Semiconductor Manufacturing Equipment
